SAWデバイス用ZnO圧電膜の端部に生じる応力の影響とその低減

抄録

This paper relates to ZnO thin films applied to SAW filters as consumer electronic products. The sputtering processes were investgated under consideration with mechanical deformations such as cracks at ZnO edges of the glass substrates. A new metal mask were designed and introduced into the ZnO sputtering processes to resolve the problems such as the ripples in the SAW filter responses due to reflections at the free edge of ZnO film and the glass cracks occured at the film edge after or during ZnO sputtering. It was cleared that the new metal mask had great effects on their troubles.