1999 Volume 119 Issue 1 Pages 57-62
Microactuators with multi degrees of freedom, which can provide a lot of benefits to precise engineering, are required for industrial applications. We propose two new actuators (V type and Δ type) which can move in x, y and θ directions. They consist of piezoelectric and electromagnetic actuators. The proposed actuators realize high resolution by using the piezoelectric actuators. We describe the structure and principle of the proposed actuators, and the feasibility of the proposed actuators is studied. The resolution in x direction was obtained to be 70nm and that in θ direction was 0.5 μrad by the Y type actuator. The resolution in x direction was obtained to be 90nm and that in θ direction was 0.6 μrad by the Δ type actuator.
The transactions of the Institute of Electrical Engineers of Japan.C
The Journal of the Institute of Electrical Engineers of Japan