2000 Volume 120 Issue 10 Pages 1510-1511
The influence of process parameter such as kinetic energy of the ion and sample temperatures was investigated in detail in order to discuss the dry etching mechanism of polymer. Extremely smooth polymeric optical waveguide could be fabricated by chemically assisted Nitrogen ion beam etching. From these experimental results, it was found that the heating temperature was the critical parameter for polymer dry etching.
The transactions of the Institute of Electrical Engineers of Japan.C
The Journal of the Institute of Electrical Engineers of Japan