A microwave excited atmospheric pressure plasma source was set up and the surface modification of polyimide film and plasma cleaning experiment to an oil contaminated stainless steel plate was conducted, while considering the radical density in the plasma. Ar-O2 or Ar-H2O mixture gas was used as plasma gas. The high-speed treatment in about 1 second after plasma irradiation was observed in the polyimide film plasma treatment. In the plasma cleaning experiment, the sufficient removal of hydrocarbon oil contaminate was observed after 30 seconds treatment time. The results of these plasma treatments were discussed using the measured value of radical density and the numerically calculated axial distribution of various radicals.
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