A relation between high-frequency properties and an angle θ of anisotropy magnetic field in CoFeSiO/SiO2 multilayer nano-granular magnetic film for an RF planar spiral inductor was described in order to suppress a leakage flux. A ferromagnetic resonance (FMR) frequency fr and an FMR half-width Δfr were very little dependence on θ. The FMR frequency fr and the FMR half-width Δfr were estimated about 2.5 and 0.3 [GHz]. On the other hand, the static permeability μs was dependent on approximately sin2θ. The static permeability in hard axis μh was estimated about 250. So then, the CoFeSiO/SiO2 multilayer nano-granular magnetic film has superior high frequency character for the inductor.