電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
特集論文(I)
閉磁路RF平面スパイラルインダクタの漏れ磁束を考慮した一軸磁気異方性薄膜の磁気モーメント制御
曽根原 誠池田 賢司佐藤 敏郎
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2012 年 132 巻 10 号 p. 822-826

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A relation between high-frequency properties and an angle θ of anisotropy magnetic field in CoFeSiO/SiO2 multilayer nano-granular magnetic film for an RF planar spiral inductor was described in order to suppress a leakage flux. A ferromagnetic resonance (FMR) frequency fr and an FMR half-width Δfr were very little dependence on θ. The FMR frequency fr and the FMR half-width Δfr were estimated about 2.5 and 0.3 [GHz]. On the other hand, the static permeability μs was dependent on approximately sin2θ. The static permeability in hard axis μh was estimated about 250. So then, the CoFeSiO/SiO2 multilayer nano-granular magnetic film has superior high frequency character for the inductor.

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© 2012 電気学会
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