IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Paper
Plasma Processing for Carbon Nanomaterials
—Syntheses of Nanostructures and their Process Control by Numerical Simulation of Plasma—
Yoshiyuki SudaHirofumi TakikawaHideto Tanoue
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JOURNAL FREE ACCESS

2012 Volume 132 Issue 6 Pages 421-427

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Abstract

Plasma is a useful tool to synthesize carbon nano-materials including diamond, fullerene, nanotube and graphene. This review introduces the overview of these carbon nano-materials produced by thermal or non-thermal plasmas and also the authors' work related to plasma-enhanced chemical vapor deposition of carbon nanotubes and its correlation with numerical simulation of CH4/H2 feedstock gas plasmas. The amount of carbon atoms in the CNTs grown and that calculated from simulation showed good agreement.

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© 2012 by the Institute of Electrical Engineers of Japan
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