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電気学会論文誌A(基礎・材料・共通部門誌)
Vol. 132 (2012) No. 6 P 421-427

記事言語:

http://doi.org/10.1541/ieejfms.132.421

論文

Plasma is a useful tool to synthesize carbon nano-materials including diamond, fullerene, nanotube and graphene. This review introduces the overview of these carbon nano-materials produced by thermal or non-thermal plasmas and also the authors' work related to plasma-enhanced chemical vapor deposition of carbon nanotubes and its correlation with numerical simulation of CH4/H2 feedstock gas plasmas. The amount of carbon atoms in the CNTs grown and that calculated from simulation showed good agreement.

Copyright © 2012 電気学会

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