2014 年 134 巻 5 号 p. 307-314
We have succeeded in developing new dynamic-micro-plasma-excited deep ultraviolet light emitting device using Aluminum Gallium Nitride (AlGaN) multi-quantum wells (MIPE), of which operating principle is completely different from current-injection type deep ultraviolet light emitting diode. We have realized a 12cm×5.5cm size device with a power of about 1W at the wavelength of 325nm. We can realize panel type laminar flow water purification and air cleaning systems which can be alternative system using DUV light source of mercury lamp, of which no usage is required by Minamata treaty. The wavelength region from 210nm to 250nm realized in this device opens new academic and application fields in which decomposition of hard materials and synthesis of new materials including a new H2 battery cell as well as disinfection of water are expected.
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