Effects of Ion Implantation on Oxygen Vacancies in YSZ

Abstract

Photoluminescence (PL) due to oxygen vacancies appearing in yttria-stabilized zirconia (YSZ) decreases clearly by ion implantation in both bulky single crystal plates and thin multicrystal films. This indicates that segregation into Y₂O₃ and ZrO₂ and change in charging state of oxygen vacancy occur similarly in the two substances despite big differences in their thicknesses and morphologies.