The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Current-Voltage Characteristics of Contaminated Single Probe and its Application to Estimation of Plasma Polymerized Film Thickness
Shinji Yamaguchi, Goro Sawa, Masayuki Ieda
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1981 Volume 101 Issue 2 Pages 80-86

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