The transactions of the Institute of Electrical Engineers of Japan.A
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Effects of Applying two Kinds of R. F. Fields on Inductively Coupled R. F. Discharges
Haruo Nagahama, Takashi Fukumura, Teruo Takamoto
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1988 Volume 108 Issue 2 Pages 51-58

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