電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
Ti陰極N2ガス導入真空アークプラズマの質量スペクトルおよびイオンエネルギー分布計測
滝川 浩史宮野 竜一真鍋 和男榊原 建樹
著者情報
ジャーナル フリー

119 巻 (1999) 2 号 p. 183-189

詳細
PDFをダウンロード (1555K) 発行機関連絡先
抄録

Mass spectra and ion energy distribution in a conventional reactive vacuum arc deposition apparatus with Ti chathode and N2 gas flow were measured. The experiment was carried out at different distances from the cathode surface as a function of gas pressure with an energy quadrupole probe analyzer. From the result of mass spectroscopy, it was found that Ti and N2 existed in the plasma as neutral particles, and that N might exist as well.
From the data of ion energy measurement, very few N3+ and TiN+ were also identified as well as Ti+, Ti++, N+, and N2+. It was found that their energies and relative quantities depended on the distance from the cathode surface and the gas pressure. Ti++ had the highest energy as high as 130 eV and the widest distribution among the ions concerned, and its energy distribution had two peaks at lower pressure and at the position near the cathode. The energy of Ti++ decreased with the distance from the cathode surface and increasing the gas pressure. The amount of Ti+ increased with distance and the energy was relatively low. The profile of the energy distributions of N+ and TiN+ showed a similarity to that of Ti++. The peak energy of N2+ also had lower energy of about 10 eV, compared with Ti++, N+ and TiN+.
Taking into account the potential hump theory of the cathodic arc, we proposed a novel reaction process in the plasma based on the results obtained here.

著者関連情報
© 電気学会
前の記事 次の記事

閲覧履歴
ジャーナルのニュースとお知らせ
  • 【電気学会会員の方】購読している論文誌を無料でご覧いただけます(会員ご本人のみの個人としての利用に限ります)。購読者番号欄にMyページへのログインIDを,パスワード欄に生年月日8ケタ(西暦,半角数字。例:19800303)を入力して下さい。
ダウンロード
  • 論文(PDF)の閲覧方法はこちら
    閲覧方法 (389.7K)
関連情報

J-STAGEがリニューアルされました!  https://www.jstage.jst.go.jp/browse/-char/ja/

feedback
Top