2004 Volume 124 Issue 9 Pages 901-908
Motion controls in modern servo systems are required to be of high speed and high precision, therefore linear motors are widely introduced into the linear slider system.
Direct drive by the linear motor causes the stage to vibrate due to the reaction force arisen from the motion of the stator and the stand.
This paper is concerned with the design of a control system for motion control of serial twin sliders driven by linear motors. The control system, consisting of a feedforward controller and a feedback controller, is two degree of freedom control. The feedforward controller is designed to decouple the coupled dynamics of two sliders using an inverse transfer function of the system. On the other hand, the feedback controller has a conventional PID algorithm. Experimental results have shown the high control performance of the control system and the effectiveness of the proposed method.