電気学会論文誌D(産業応用部門誌)
Online ISSN : 1348-8163
Print ISSN : 0913-6339
特集論文
非共振型超音波アクチュエータ駆動精密ステージの位置決め制御における摩擦補償法
橋本 誠司大石 潔小坂 光二石川 赴夫久保田 弘大見 忠弘
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2006 年 126 巻 6 号 p. 719-725

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This research has aimed at the control system development of a non-resonant ultrasonic motor (SPIDER)-driven precision stage. SPIDER is newly developed as an actuator to achieve the positioning performance required for next generation. In this paper, friction compensation is firstly realized considering integral effect of controllers. Next, the compensation is achieved based on the adaptive friction observer. Moreover it is experimentally verified that the stick-slip phenomenon is prevented for an environmental change by the proposal technique, and a quick positioning in the scale resolution becomes possible.

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© 電気学会 2006
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