Frequency Response Data-based Feedback Controller Auto-tuning Method Utilizing both Collocated and Non-collocated Sensors

Abstract

In motion control applications, such as machine tools and high-precision positioning stages for the semiconductor or flat panel industry, it is becoming common to place sensors on not only the motor side (collocated side) but also the load side (non-collocated side). The load side information enables compensation of transmission dynamics, such as friction or backlash. However, due to the phase lag of the load side frequency characteristics, it is difficult to increase the feedback bandwidth. To address this problem, this paper proposes a frequency response data-based feedback controller design method utilizing both collocated and non-collocated sensors. Experimental results demonstrate that the proposed method effectively suppresses the input disturbance. Moreover, the proposed optimization requires less calculation time compared with nonlinear optimization with random initial values and achieves better performance.