IEEJ Transactions on Power and Energy
Online ISSN : 1348-8147
Print ISSN : 0385-4213
ISSN-L : 0385-4213
Structure of Non-equiliblium Seeded Plasma Excied with Microwave
Makoto MIYAKAWATomoyuki MURAKAMITetsuya SUEKANEYoshihiro OKUNOShigeharu KABASHIMA
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1996 Volume 116 Issue 11 Pages 1368-1373

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Abstract

Structure of non-equilibrium cesium seeded argon plasma excited with microwave power is simulated numerically. The plasmas produced at suitable microwave powers are found to consist of three regimes, that is, the region limited by charged particle loss toward the wall, the full seed ionization and the diffusion limited regions. The fully ionized seed plasma is produced within the skin-depth determined by the electrical conductivity of the plasma, and the thickness of the fully ionized seed plasma depends on the seed fraction, gas pressure and microwave power.

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