電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
SOI基板によるマイクロレンズ光スキャナの製作
猿田 訓彦藤田 博之年吉 洋
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2003 年 123 巻 7 号 p. 231-236

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Two-dimensional (2D) optical scanner has various applications particularly for building 3D micro optical cross connects (OXC). Most MEMS OXC reported today use electrostatic tilting mirror. However, the mirror-type 2D scanners have an optical alignment issue associated with fiber core deviation. In this paper, we propose a bulk micromachined electrostatic 2D scanner using silicon micro lens as an alternative method for optical scan. The lenses (diameter 260µm) and the driving actuators are integrated on the same layer of a silicon-on-insulator (SOI) wafer. This paper deals with the design, fabrication, and electromechanical characteristics of the bulk micromachined silicon scanner.

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© 電気学会 2003
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