磁気ディスクヘッド素子駆動用静電マイクロアクチュエータ

抄録

We have newly developed a prototype model of silicon microfabricated piggyback actuator for positioning a read/write head of magnetic hard-disk drive, which is usually referred to as a dual servo system because the piggyback actuator for fine control is used in collaboration with the voice-coil motor for coarse control. The actuator is made of a 50-micron-thick SOI (silicon on insulator) wafer processed by deep RIE (reactive ion etching) of high-aspect ratio. Actuation mechanism is based upon electrostatic force generated by multiple parallel plates. Maximum displacement of 0.2μ with a dc driving voltage of 20V has been achieved with a 1mm × 0.3mm actuator of its resonance at 25kHz. An analytical model for predicting electromechanical performance has also been developed.