Polymer-MEMS and Its Applications

Abstract

Fabrication methods of polymer microstructures for μTAS, Lab-on-a-chip and BioMEMS developed so far are reviewed. Conventional plastic molds of hot embossing, injection molding and casting have been applied for fabrications of the microstructures with improvements of precise temperature control etc. New silicone like material, PDMS have been widely used in μTAS. Some UV photolithography methods have also been developed to realize 3D microstructures. Surface micromachining technologies using polymer as the structure and positive photoresist as the sacrificial layer are another potential fabrication methods in μTAS.