HRTEM Observation and Current Measurement of the Approach-Contact-Deformation-Fracture Process at MEMS Nano Contact between MEMS Opposing Tips

Abstract

The approach-contact-deformation-fracture process at a gold nano contact using a micromachined device was successfully observed in a high resolution transmission electron microscope (HRTEM). MEMS opposing tips (a movable tip with a pair of electrostatic actuators and a fixed tip) was inserted into a HRTEM chamber. When the movable tip was approached to the fixed tip within 1 nm, gold nano contact was formed with 1 V bias voltage. The gold nano contact was thinned by retraction and finally fractured. The series of the formation, retraction and fracture were observed in an atomic scale.