表面プラズモン共鳴を用いた光タクタイル圧力センサ

抄録

An optical tactile pressure sensor using surface plasmon resonance is reported. A colloidal crystalline membrane of elastic polymer particles (n = 1.59) is pressed against a surface of Au film on a glass prism (n = 1.51) where SPR is excited. At the contact area between the particle and Au film, excitation condition of SPR is broken and the incident light internally reflects. Since the contact area changes reversibly according to the loaded pressure, optical measurement of pressure is realized by monitoring the intensity of reflection light. Measurement of 5 MPa was achieved by the proposed method.