IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
Special Issue Technical Note
FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOneTM
Hirofumi MiuraJunji SoneDominique CollardChristophe YamahataHiroyuki Fujita
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2008 Volume 128 Issue 5 Pages 252-256

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Abstract

In this study, we investigate improvements in silicon nanotweezers used to handle DNA molecules. We analyzed the deformation and frequency properties of the nanotweezers by finite element method (FEM) analysis. From this analysis, we determined the appropriate operation area of the nanotweezers.

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© 2008 by the Institute of Electrical Engineers of Japan
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