Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring

Abstract

This paper present design, fabrication and characterization of a miniaturized single crystal cantilever type 1-axis MEMS accelerometer with piezoresistive sensing elements utilizing bulk micromachining techniques. It has overall dimensions of 950um×850um×450um, length width and thickness, respectively. This accelerometer is being introduced for a wearable sensing system for real-time activity monitoring. Possible cases of experiments have been conducted to evaluate our system and algorithm.