高信頼高精度自動車用マイクロエアフローセンサ

抄録

A new cyclone bypass is adopted to prevent collision of dusts and water splash to the sensing element. Poly silicon heater and temperature sensor are used to obtain corrosion resistance and acidity-proof of the sensing element. The signal conditioning LSI compensates sensor characteristic by calculate 3rd order polynomial expression. Micro airflow sensor for automobile with high accuracy of 2% and high reliability of 2% was achieved.