電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
浮島構造を用いたSOI静電駆動型チルトミラーの信頼性改善
諫本 圭史鄭 昌鎬藤田 博之年吉 洋
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2011 年 131 巻 2 号 p. 81-87

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We have improved the performance and reliability of an SOI electrostatic MEMS tilt mirror by using a landing island structure in the substrate layer. The landing island is electrically isolated from the substrate layer and has the same electrical potential with the suspended mirror structure. It works as a mechanical stopper to suppress the hysteresis due to the electrostatic pull-in and to avoid the electrical short-circuit between the actuator electrodes. The air-squeezed dumping effect of the landing island has also been found to eliminate the ringing and improve the step response. This structure can be made by the conventional SOI bulk micromachining with two photo masks. We used the new newly developed tilt mirror in a variable optical attenuator and cleared the Bellcore GR1221.

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© 電気学会 2011
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