The DNA transistor is quick, easy and useful sensor of DNA sequencing. But its sequencing requires some chemical liquids and we need external pumps and tubes to provide to the sensor. As a result, the sequencing system is so complex and large. To improve sequencing tools, we consider the integrated system of sensor with pump. In this study, we present the integrated system of sensor (pH sensor) with micro-pump and the monolithic process of the integrated device. We evaluate the micro-pump driving of some liquid samples using pH sensor.