Feasibility Study for Designing a Parylene Actuator for Nano-positioning

抄録

We considered a polymer-based piezoelectric stack actuator that is based on MEMS nano-positioning technology. We studied the structure of the actuator and important parameters of the actuation design. We used FEM to simulate the electric field, deformation and resonance frequency. On the basis of this simulation, we established the appropriate parameters for the actuator.