役に立つMEMSに向けて

抄録

MEMS (Micro Electro Mechanical Systems) play important roles as key components in systems. However it is not easy to be applied in market because these require heterogeneous knowledge and expensive facilities. Training of MEMS engineers who have practical experiences, accumulation and its exploitation of experiences and sharing of facilities are required for MEMS to be used in a market. Technical approaches for the practically applicable MEMS as hetero integration with circuit and packaging are described.