電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
液相中への縦波放射を利用したレイリー型表面弾性波センサーの開発
小川 健吾鳥越 俊彦澤田 研岩佐 達郎永野 宏治柴山 義行夛田 芳広植杉 克弘福田 永
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2015 年 135 巻 12 号 p. 490-495

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This paper reports the Rayleigh wave sensor using a longitudinal wave radiation into a liquid phase. The sensor using a longitudinal wave radiation of dozens MHz band had been reported, but we have enabled to measure at a high frequency of 197 MHz by confining the sample solution of a few µL in glass groove holder. We have compared the already known longitudinal wave radiation model that varies with the sound velocity in the solution to the measured value of a SAW device that we have developed, reports on the results that led the model of new SAW sensor from the phenomenon that the phase shift caused by the groove opening shape.

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© 2015 電気学会
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