電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
特集論文
表面波と結合した回折格子中共鳴モードによる熱輻射制御
-光学解析と製作法検討-
伊藤 晃太松井 崇行飯塚 英男年吉 洋
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2015 年 135 巻 5 号 p. 184-190

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Subwavelength structures are attracting scientific interests as a novel mean of thermal radiation control. In our previous work, we proposed emissivity control through the coupling between the surface polariton and the guided mode in resonant gratings. In this paper, we analytically investigate the emissivity of the thermal emitter that consists of slightly doped silicon gratings and a heavily doped silicon layer. The modal analysis is used to evaluate the active modulation capability. Fabrication process to manufacture the device and challenges encountered on the fabrication are discussed. The actuation of the grating height is also simulated.

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