電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
生体膜操作用の可逆動作機構をもつ形状記憶合金厚膜マイクログリッパ
佐藤 諒鎌田 隆宏峯田 貴
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ジャーナル フリー

2016 年 136 巻 10 号 p. 454-459

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A micro-gripper of reversible operation mechanism was designed and fabricated from a flash-evaporated SMA film of 30 µm in thickness. Thin film Pt heaters, strain gauges, and Pt-Au thermo-couple circuits were integrated on the SMA gripper. The gripper is closed at low temperature because both outer and inner arms of the gripper were similarly deflected due to intrinsic film stress. The gripper has a mechanism to be opened by the outer arm heating for flat shape recovery. The deflection propertied of the SMA gripper was evaluated. The outer arm of the gripper was reversibly deformed to 15 µm or larger when it was heated in water. The gripper was not opened enough for gripping thick bio-films because the temperature of the SMA outer arm was not reached to the peak deformation temperature of the SMA film (~60oC). The inner arm was also deformed to several microns due to the thermal conduction from the heated outer arm. In air operation, the heated outer arm and non-heated inner arm were deformed to 45 µm and 15 µm, respectively. The outer arm was heated to 300oC which was too high to use for bio-film handling. Spring constants of the inner arm were measured as 29.4 N/m which corresponds to a gripping force of 1.6 mN when a 50 µm thick sheet is held by the gripper.

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