電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
水晶振動子を用いた液体分析用コンボセンサにおける形状最適化
坂井 了今井 寛明寒川 雅之安部 隆
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キーワード: 水晶振動子, 液体センサ
ジャーナル 認証あり

2016 年 136 巻 8 号 p. 343-347

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In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.

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