電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
特集論文
多層膜被覆周期的微細構造を用いた高温用太陽光選択吸収材料
清水 信阿久津 宏樹津田 慎一郎引地 広介熊野 勝文湯上 浩雄
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2017 年 137 巻 11 号 p. 393-399

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Solar selective absorbers that function at temperatures up to 700°C and possess shallow honeycomb cylindrical microcavities coated with a metal-dielectric multi-layer are investigated. Even shallow microcavities, absorptance at solar spectrum range is largely increased due to multilayer showing spectrally selective absorption property. To obtain high spectral selective property, design strategy for the multilayer coated microstructure is established. Honeycomb array cylindrical microcavities were fabricated on tungsten substrate and multi-layers consisting of platinum nano-film sandwiched by aluminum oxide layers were created for a uniform coating via atomic layer deposition. Thermal stability of the fabricated sample at 700°C in vacuum is verified through annealing test for 100 h.

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