電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
特集論文
面外熱駆動Auナノグレーティングを用いたマイクロ光学位相子の透過率変調
志村 崇岩見 健太郎梅田 倫弘
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2017 年 137 巻 11 号 p. 400-406

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A reconfigurable transmittance modulation device for Au nanograting retarder that consisted of out-of-plane thermally-driven grating was designed, fabricated, and demonstrated. In this study, an Au nanograting that is known to exhibit giant birefringence was constituted by integrating MEMS thermal actuators. The thermally-driven grating was made of Au/SiO2 bimorph beams that period and slit width are 800 nm and 400 nm, respectively. The device is fabricated on a glass substrate with embedded Si as a sacrificial layer. The gap between the grating and the substrate is changed by applying driving current, and transmittance was changed affected by Fabry-Pérot interference. Transmittance peak wavelength for TE polarization was shifted up to 40 nm keeping the retardation of the Au nanograting. A calculation model of transmittance applying multilayer interference was proposed and demonstrated its effectiveness in TE polarization. By optimizing the design dimensions of the Au nanograting, it is expected to realize a microscale waveplate capable of transmittance modulation.

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