電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
QCMを用いたCO2センサの温湿度特性
—アクリロニトリルスチレンを感応膜とした場合—
村岡 茂信東本 慎也貞広 政紀山内 謙大植 弘義大松 繁
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2017 年 137 巻 4 号 p. 115-120

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Temperature and humidity characteristics of a QCM coated with acrylonitrile styrene copolymer (AS) were studied as a CO2 sensor. Consequently, the following results were obtained. 1) A frequency shift of the QCM is in proportion to CO2 concentration under the condition of constant temperature. 2) The sensitivity for CO2 concentration decreases in a linear fashion with a rise in temperature. 3) The frequency shift increases in a parabolic fashion and the sensitivity for humidity increases in a linear fashion with a rise in humidity under the condition of constant temperature. 4) The sensitivity for absolute humidity decreases in a parabolic fashion with a rise in temperature under the condition of constant absolute humidity.

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