Since MEMS (Micro Electro Mechanical Systems) sensors were initially commercialized as accelerometers for Airbag systems in the 1990s, they have been widely used for various applications. The common detection mechanisms for accelerometers are piezoelectric, piezorsistive or capacitive. Among them the capacitive type is easy to be produced using the MEMS technology. This paper focuses on capacitive micro accelerometers fabricated using a simple SOI-MEMS technology, investigates the dependences of their sensitivities and resonant frequencies on the beam parameters and its configuration, and describes the feasibility study on accelerometers with beam lengths as long as the side length of the proof mass.
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