Humans recognize surface texture of objects by perception of force and vibration during contact. In our previous work, it is demonstrated that multi-axial contact force can be detected by tactile sensor using Si microcantilevers with thin film strain gauge embedded in the elastomer. In this work, to detect vibration, Si microcantilever with PZT thin film embedded in the elastomer has been newly fabricated and characterized. As a result, the output voltage depending on vibration frequency can be successfully obtained from PZT on the fabricated microcantilever. Furthermore, the microcantilever has been thinned by dry etching process after fabrication and it is suggested that sensitivity and frequency characteristics of the vibrational tactile sensor can be controlled.
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