電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
特集論文
金属基材薄膜センサ素子用塗布型粘土絶縁膜
丹羽 英二林 晋也須貝 一郎野口 幸紀飯島 高志棚池 修蛯名 武雄
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2019 年 139 巻 7 号 p. 201-208

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A coating type clay insulating layer was successfully fabricated on a stainless steel surface by dip coating of an aqueous paste of hectorite clay followed by calcination at 600℃. A surface roughness and electrical characteristics of the clay layer were evaluated. Cr-N thin film strain sensors on the clay insulating layer and stainless steel substrate were fabricated and the output properties of them were investigated. It is considered that the clay layer is expected as a candidate of lower-cost insulating materials.

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