IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Paper
Novel Estimation Method of Force Application Point for Cantilever-Type MEMS Tactile Sensor
Harufumi HosokawaRyusuke MitobeTakashi AbeMasayuki Sohgawa
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2025 Volume 145 Issue 7 Pages 144-150

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Abstract

In this paper, we propose a new evaluation method for the spatial distribution of sensitivity to force in a cantilever-type MEMS tactile sensor developed in our laboratory. By combining the responses of two strain gauges attached to the cantilever with different coefficients, it is shown that the spatial distribution of sensitivity can be controlled and the force application position and the magnitude of force can be predicted with high accuracy.

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© 2025 by the Institute of Electrical Engineers of Japan
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