IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film
Osamu TabataToshiyuki Tsuchiya
Author information
JOURNALS FREE ACCESS

1996 Volume 116 Issue 1 Pages 34-35

Details
Article 1st page
Information related to the author
© The Institute of Electrical Engineers of Japan
Previous article Next article
feedback
Top