S字型静電駆動フィルムアクチュエータの動作特性

雰囲気圧力がフィルム移動速度に及ぼす影響

抄録

We have experimentally measured the response time of an electrostatic S-shaped film actuator relative to environmental gas pressure and applied voltage aiming at an application to gas valve systems. This actuator has an Sshaped film element whose S-shape propagates in the lateral direction. We measured the propagation speed of the Sbend continuously from start to stop positions by detecting capacitance change between the film and one of the actuator electrode plates. It reached 7m/s when the pressure was 1Pa and the applied voltage was 120V. The response times of the actuator, in which the film travels 5mm laterally and 2mm vertically, are 7.7ms at atmospheric pressure and 2.2ms at a low pressure of 100Pa.