IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
Cross Type PSD Sensor for Position Error and Rotation Angle of Target Hole
Soichiro Hayakawa, Nuio Tsuchida, Koji Imai, Asao Tanaka
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Volume 118 (1998) Issue 6 Pages 339-340

DOI https://doi.org/10.1541/ieejsmas.118.339
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