High Frequency and High Speed IC Inspection Probe using Quartz Crystal Micro-Balance

Abstract

The electro optic (EO) sampling method is a technology to allow the measurement of high-speed electric signals with "non-contact" and "low disturbance." To achieve excellent reproducibility measurement, control of the vertical EO probe position needs to have sub-micron accuracy. Therefore to realize this, we had to design a probe with a characteristic frequency of several kilohertz and a mechanism that can prevent the probe position from being affected from external vibration. We have developed an EO probe that employs a micro-balance mechanism and has been manufactured using quartz micro machining technology. This probe realized a high characteristic frequency and applies an extremely small contact load to the measured ICs.