1993 Volume 1993 Issue 2 Pages 121-130
This paper deals with the development of two-type ultra high speed valves, one of them is a highspeed digital valve whose switching speed is within 100 microseconds, and the other is an ultrahigh-speed servo valve with the spool displacement of 30μm and the bandwidth over 5kHz. In this study, commercially available multilayered piezo-devices are used to drive the coupled poppets of the digital valve and the spool of the servo valve directly. In the former one, by introducing a kind of feed forward control and employing some new methods, on-off-type coupled poppet valves with high-speed response to within 100 microseconds of switching speed are successfully developed. In the latter one, the hysteresis of the driving element of the valve is removed by introducing an inverse hysteresis element implemented on a microcomputers and operated in real time. As a result, a servo valve with the bandwidth over 5kHz is developed.
