1993 Volume 33 Issue 9 Pages 957-962
To study the ultra-low loss of TiN-coated silicon steel sheets, the influence of the coating conditions on magnetic properties was investigated, relating to the thickness, bias voltage and temperature used for TiN ceramic coating by the hollow cathode discharge (HCD) method on polished silicon steels sheets. The magnetic properties of the TiN-coated silicon steel sheets after ceramic coating were evaluated. Measurements by thin-film X-ray diffraction and color monitoring, and observations of the magnetic domain were also carried out.
The experimental results obtained are summarized as follows.
(1) The magnetic flux density and iron loss of the TiN-coated silicon steel sheets were progressively improved with increasing coating thickness up to 0.7 μm, and became saturated at 1.0-1.5 μm in thickness. This improvement in magnetic properties was most marked in silicon steel sheets with the highest magnetic flux density. For example, silicon steel sheet with B8=1.93T had the magnetic flux density improved by 0.007T and the iron loss dramatically improved by 0.15 W/kg.
(2) With bias voltages in the range of –50 to –100 V, the iron loss in the TiN-coated silicon steel sheets was most improved. Thin-film X-ray diffraction inspection indicated a strong peak of (111) of TiN.
(3) With coating temperatures in the range of 573 to 673 K, the iron loss in the TiN-coated silicon steel sheets was most improved.
