ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
21.36
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Influence of the Metal Film of Micro-cantilever Fabricated by Photolithographical Technique on the Mechanical Resonant Frequency
Akio KuroeAkio MurataSayuri MuramatsuKazuo YokoyamaOsamu Kusumoto
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Pages 7-11

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Abstract

Influence of the metal film of the micro-cantilever on the mechanical resonant frequency has been investigated theoretically and experimentally. It has been found that the resonant frequency values calculated from formula deduced using the composite cantilever model consisting of two kinds of different material films almost agree with the experimental values. The composite micro-cantilever having the resonant frequency of 1.07MHz has been also developed.

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