Abstract
As the thickness of each layer in organic LED is very thin (<100nm), surface condition of ITO is thought to affect the luminescence property of OLEDs. In this study, the relationship between structural and luminescent properties of OLEDs and surface state of ITO substrates was investigated. Polished ITO and etched ITO were prepared and EL device with a structure of CuPc/α-NPD/Alq_3/Al was fabricated on those ITO substrates. It was found that surface roughness of the OLEDs depended on that of the ITO. However, the strong dependence of luminescence property on the ITO surface roughness was observed.