L1_0-FePt ordered alloy thin films were fabricated by annealing Fe/Pt/X trilayers to control magnetic properties suitable for next generation perpendicular magnetic recording media. Cu and Au were used to get magnetic properties suitable for heat assisted magnetic recording media and to fabricate FePt ordered phase at low annealing temperature, respectively. It was confirmed that the curie temperature of FePtCu films was 280℃ and perpendicular coercivity decreased to 1kOe at around the curie temperature. Though it needed at least 550℃ of annealing temperature to get L1_0-FePt ordered alloy, FePt was successfully attained at lower annealing temperature (500℃) by adding Au into FePt.
