ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
36.11
Session ID : IDY2012-15
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Flexible MEMS Color Pixels by Printing Technology
Hiroshi TOSHIYOSHI
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

We have developed a flexible color-pixel sheet based on the electrostatically addressable MEMS (micro electro mechanical systems) Fabry-Perot interferometer array using the printing technology such as gravure, flexo, emboss and ink-jet on a plastic film. This paper reports the design, fabrication process, and optomechanical performance of the developed color pixels.

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© 2012 The Institute of Image Information and Television Engineers
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