47th Proceedings of the Japan Joint Automatic Control Conference
Session ID : 402
Conference information
Host: The Japan Society of Mechanical Engineers, The Society of Instrument and Control Engineers, The Institute of Systems, Control and Information Engineers, The Society of Chemical Engineers, Japan, The Japan Society for Precision Engineering, The Japan Society for Aeronautical and Space Sciences
Co-host: Technically Cosponsored by 43 Socies and Institutes
Position control of the microscope stage using piezo-electric elements based on acquired data of stage movements
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